A Robust Microfabricated Specimen Support with Integrated Capabilities for in situ Experimentation in the Transmission Electron Microscope

As the nanotechnology revolution advances, existing and new applications are demanding improved capabilities from the transmission electron microscope ¿ in particular, higher resolution and a greater ability to manipulate specimens in situ. No known commercial system provides both accurate control over specimen temperature and the simultaneous ability to create a stable gaseous environment. This project will develop advanced specimen-support technologies for observing and manipulating specimens at the nanoscale in an electron microscope. During Phase I, semiconductor microfabrication technology was used to create specimen supports with integrated heaters that could control specimen temperature up to 2000K within 15 milliseconds. The Phase II will focus on using these specimen supports as the core components of two prototype in situ systems for the transmission electron microscope ¿ a Micro-Heating System and a Micro-Environmental Cell System ¿ allowing control of temperatures and gases around the specimen. These prototype systems will be delivered to collaborators for evaluation. Commercial Applications and other Benefits as described by the awardee: The specimen support technology should provide revolutionary capabilities to commercial, government, and academic markets by greatly enhancing in situ capabilities at an easily affordable price. Moreover, a microfabricated specimen support is a platform technology that offers opportunities for developing additional features and capabilities in future releases. Areas of application include hydrogen storage, air quality, high temperature and corrosion-resistant materials, and semiconductors