SBIR/STTR Research Award

PROCESS MODELING OF MAGNETRON REACTIVE ION ETCHING (MIE) - APPLICATIONS TO GAAS AND ALGAAS

Award identifier 2f4f2bfc86dad292e63349e5c74c6a73e683c06474334560d8182698e18b6e91Awarding agency Department of Defense · Army

Award amount

$59,537

Program and phase

SBIR · Phase I

Award year

1987

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Award details

Awarding agency
Department of Defense
Branch
Army
Recipient company
SCIENTIFIC RESEARCH ASSOC., INC.
Proposal award date
Not reported
Contract end date
Not reported
UEI
Not reported
Solicitation number
Not reported
Topic code
Not reported

Research abstract

N/A

Technology keywords

Not reported

Agency intelligence

Department of Defense

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