SBIR/STTR Research Award
Rapid and Accurate High-Resolution Ion Microscopy for Semiconductor Metrology
Award amount
$289,529Program and phase
SBIR · Phase IAward year
2024Award details
- Awarding agency
- Department of Commerce
- Branch
- National Institute of Standards and Technology – CHIPS
- Recipient company
- STEAM INSTRUMENTS INC
- Proposal award date
- 2024-09-17
- Contract end date
- 2027-03-30
- UEI
- LXQ8L5NBEHT6
- Solicitation number
- 2024-SBIR-CHIPS-01
- Topic code
- 2
Research abstract
This Small Business Innovation Research project aims to develop new ultra high-speed nanoprobes. This new and critically needed technology will enhance the ability for semiconductor failure analysis engineers to locate and analyze "soft" electrical faults, which occur in the most advanced semiconductors and are otherwise difficult to detect.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- SBIR Phase II: Ion Optics Optimized for Nanoscale Stigmatic Imaging
- Multimodal Stigmatic Laser Ion Imaging Mass Spectrometry
- SBIR Phase I:Optimized Extraction and Projection Optics for Ion Point Sources
- Multimodal Stigmatic Imaging Mass Spectrometry with Flat-Top Laser Probe
- A New Superconducting Detector Technology for Mass Spectrometry of Large Biomolecules
Research funding history
6 SBIR/STTR records share this UEI (2020–2025). Reported award amounts total $3,365,136. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: National Science Foundation, Department of Energy, Department of Health and Human Services, Department of Commerce