Development of a Novel Linear Accumulating X-ray Source (LAXS) for CDSAXS

Continued scaling has driven a critical need for laboratory-based critical dimension x-ray scattering (CD-SAXS). To date, CD-SAXS has been limited by the relatively low brightness of laboratory x-ray sources, which are limited by melting or evaporation of the anode materials under electron bombardment. We proposed an x-ray source whose development will incorporate a two-pronged strategy to significantly increase the x-ray source brightness: 1) linear accumulation and 2) optimized x-ray source spot size. Linear accumulation is the sequential arrangement of specially modified x-ray sources and op􀆟cs such that the x-ray beam from one source focuses onto the x-ray spot of the next, thus adding to the output flux. Through this proposal, we expect to provide a significant improvement of over 30X in performance for CDSAXS compared to conventional x-ray sources on the market.