SBIR/STTR Research Award

NECTAR: Nanometrology for Enhanced Calibration and Transferability with Atomic References

Award identifier 4096efe46ac876f6192cc2b536e79fac7828424addd6069e3c79f87615e535f1Awarding agency Department of Commerce · National Institute of Standards and Technology – CHIPS

Award amount

$257,367

Program and phase

SBIR · Phase I

Award year

2024

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Award details

Awarding agency
Department of Commerce
Branch
National Institute of Standards and Technology – CHIPS
Recipient company
VAPOR CELL TECHNOLOGIES dba Apex Atomics
Proposal award date
2024-09-17
Contract end date
2027-03-30
UEI
JBL9ZKN6S8K8
Solicitation number
2024-SBIR-CHIPS-01
Topic code
6

Research abstract

Vapor Cell Technologies (VCT) seeks to produce advanced dimensional metrology tools for modern semiconductor fabrication equipment to minimize the gap in the physical-digital divide, amplifying the accuracy of digital twins in the transferability, production, and sustainment of semiconductor products. VCT will construct novel displacement measurement tools that are traceable to the SI meter based on high technology readiness level (TRL) and manufacturing readiness level (MRL) technologies. As a result, semiconductor metrology equipment will be lower-cost, more performant, and connected to system optimization tools to improve domestic chip manufacturing.

Technology keywords

Not reported

Other awards by this recipient

Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.

Research funding history

4 SBIR/STTR records share this UEI (2021–2024). Reported award amounts total $1,618,636. Reported amounts are not federal obligations.

Phases: Phase I, Phase II

Agencies: National Science Foundation, Department of Commerce, National Aeronautics and Space Administration

Agency intelligence

Department of Commerce

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