Digital-Output Capacitive Accelerometers for High-G Applications

In response to the 2023 DMEA SBIR Phase I solicitation topic DMEA231-001 titled High-G Accelerometers, the Interdisciplinary Consulting Corporation (IC2) proposes to develop a robust, real-time, tri-axis accelerometer using microelectromechanical systems (MEMS) technology that can provide accurate measurements in high-G environments and survive up to 60 kG. MEMS accelerometers have played a crucial role in the development of commercial technologies, including cell phones and automobiles; however, their use in military applications has been limited due to the need to survive high-G events and maintain functionality after long-term storage, while being economically feasible. Having devices that meet these specifications enable their use on military equipment (e.g., rockets, munitions, artillery), ultimately providing in-flight diagnostics and improving guidance, navigation, and control.  The goal of this research is to modify IC2’s current capacitive, silicon-based, wall shear stress sensing technology that is capable of making quantifiable mean and fluctuating skin friction measurements and allow them to be used as accelerometers in harsh military environments.