Integrated SiC Photodiode Arrays for UV-Spectroscopic Applications

nbsp;We are developing unique Silicon Carbide (SiC) solar blind UV detectors with broad potential impacts in Planetary and Earth Sciences and Heliophysics. We propose to fabricate unique, passive and active, SiC UV linear sensor arrays. We will ultimately scale up our technology to fabricate 128x2 SiC active arrays with lt;40um pixel pitch, with a 3T amplifier readout circuit integrated directly into each pixel on-chip. In Phase 1, we designed and built prototype UV optical sensor array chips to demonstrate the proof-of-concept at TRLs 3 and 4. In Phase 2, we will enhance these to TRLs 5 and 6. Building upon Phase 1, we will fabricate a variety of arrays, including 128x2 arrays with a higher-fill-factor, 256x2 arrays for higher spectral resolution, and 32x2 and 64x2 active arrays with different readout integration. Deep trenches surrounding each pixel will provide electrical isolation to eliminate crosstalk between array elements. Readout circuits will use external signals to reset the sensors, buffer the output signal, and perform read-out selection by multiplexing. This work enjoins the unique advantages of SiC, such as its extremely low dark current, even at high temperatures, its inherent visible-blindness, and its capability to grow a native oxide, to the advantages of active pixel sensor technology, such as higher sensitivity and low power consumption, to revolutionize UV sensing in the 120 to 350 nm range. As a transformative technology, it can lead to advanced, flexible instrumentation with lower design complexity for UV spectroscopy, remote sensing, remote and in-situ characterization and imaging. By comparing SiC array characteristics with literature, and testing operational characteristics on validation systems we design, we will make first-order estimates for the arraysrsquo; use in applications like remote-sensing, and Raman and reflectance spectroscopy. We will thus identify the target next-gen specifications for applications in specific instruments and missions.nbsp;nbsp;