MEMS based Pendulous Integrating Gyro Accelerometer

The Pendulous Integrating Gyro Accelerometer (PIGA) has proven to be an accurate mechanical integrator of acceleration that directly outputs a velocity measurement signal. This is in contras to a closed loop accelerometer in which the output signal is computationally integrated to obtain velocity, a methodology which is known to produce significant error. With this proposal we wish to emulate the operation of the PIGA in a MEMS form whereby the rotor, servo and pendulum components are attached to each other and capable of rotating about three mutually orthogonal axes. The rotor and servo are now oscillated. The controlling feature keeps the pendulum middle member at null.