Microfabricated Inert-Gas Pump

In Naval and other DoD applications there is a growing demand for small scale quantum sensor packages that can offer high precision measurements of position and time. However, deployment of these technologies has been hindered by the difficulty of maintaining the high-quality vacuum these sensors require for device operation, with noble gas leakage into the vacuum cells being especially problematic. To address the Navy’s need for a small pump capable of effectively pumping noble gases, Hedgefog Research Inc. proposes to develop a miniature new Microfabricated Inert Gas pump (MIGPump) capable of pumping reactive and inert gases with equal effectiveness. Utilizing a novel gas capture medium, MIGPump is capable of maintaining high quality vacuum in sensor cells with low SWaP and long lifetime. MIGPump is designed to be easily integrated with existing silicon vacuum cavity technologies to maximize compatibility with current quantum sensor packages. In Phase I HFR will demonstrate the feasibility and optimize the effectiveness of the MIGPump technology. Additionally, in Phase I HFR will design a full-scale prototype pump for Phase II manufacture and testing.