Micro-Supercapacitor for Integration with MEMS Energy Harvesting and CMOS ICs

percapacitors provide energy densities comparable to thin film batteries, high power densities, ultrafast recharge, and long cycle lives for applications requiring high duty cycle and pulse power output.  Micro-supercapacitors (MSC) are the most promising energy storage technology for integration with energy harvesting, via micro-electro-mechanical systems (MEMS), and microelectronics integrated circuits (ICs). This integration of energy generation and storage with sensing, processing, and communication enables compact systems for applications such as remote sensing. MSCs are an area of active research, and a broad variety of electrochemical double layer and pseudocapacitor active materials have been demonstrated to provide high volumetric and areal energy density in laboratory devices. A better understanding of the tradeoffs in device performance, compatibility with microelectronic integration, and cost advantages is sought by the DMEA to allow informed selection of micro-supercapacitor technologies. The subsequent MSC materials identification and process optimization, to develop a technology suitable for MEMS and IC integration, is ultimately desired.   In this Phase I effort, CFD Research and our partner, Auburn University, will develop and demonstrate a high energy density micro-supercapacitor fabricated by a process flow compatible for integration with both MEMS and CMOS ICs.  The team will down-select an electrode material, demonstrate an adaptable low-temperature electrode fabrication process, and design and demonstrate an electrode that will provide state-of-the-art areal energy density. The materials and fabrication processes will provide ease of device integration via a variety of approaches including post IC MEMS and MSC. We will identify and summarize the tradeoffs in performance, ease of integration, and cost for alternative MSC technologies during the selection and design process. The Phase II effort will focus on further optimization of the MSC and preparation for technology transfer to the DMEA and DoD suppliers.