High-Accuracy Angle Generator for Angular Calibrations to Support Optical Metrology Laboratories and Light Source Facilities.

Improving our current ability to measure the shape of x-ray focusing mirrors is necessary to advance our knowledge of the atomic structure of many types of materials, especially for the latest diffraction-limited light sources within the DOE. X-ray studies at DOE national laboratories of the atomic structure of new materials, biological molecules, etc. are limited by the quality of the x-ray spot focused onto the specimen. In turn, the quality of the focused spot is determined by the form accuracy of the optics used to focus the beam, typically a pair of elliptically-shaped mirrors used at grazing incidence. This project aims to develop a rotary table-based angle generator that can rotate a mirror or other object a known angle for use as a calibration standard on U.S. soil. This standard can then be used to measure and correct for unavoidable systematic errors in the sensors of the x-ray mirror profilers used to measure mirror shape in DOE metrology labs. Thus, this project will help to improve the quality of science that is performed at DOE light sources. In Phase I we used a model system to develop software for an advanced calibration algorithm and the design concepts for the full prototype. After we build the prototype in Phase II, the device will be an upgrade to an existing commercial calibration service and be available as a new commercial product. Industries such as aerospace/defense, semiconductor manufacturing, and precision positioning are all potential users and beneficiaries of this new angle generator.