Ultra-Low Profile, Flat-Packaged Microphones for In-Flight Aeroacoustic Measurements

The Interdisciplinary Consulting Corporation (IC2) proposes the development of a low-profile instrumentation-grade pressure sensor for in-flight aerodynamics measurements using microelectromechanical systems (MEMS) based piezoelectric sensing with backside contacts and advanced packaging technology.nbsp; The goal of this research is to develop a pressure sensor that meets the demanding in-flight performance requirements for aerodynamic and aeroacoustic applications while leveraging MEMS batch fabrication technology to reduce size and significantly reduce cost per channel. Specifically, this sensor technology will be developed to address NASArsquo;s needs for ldquo;measurement technologies for in-flight steady amp; unsteady aerodynamicsrdquo; as per Subtopic A2.01 Flight Test and Measurements Technologies of the NASA FY 2019 SBIR/STTR Solicitation.nbsp; This work is aimed at meeting the aerospace industryrsquo;s need for economically viable sensing technology that meets required metrics for flight testing.nbsp;