X-RAY MICROLITHOGRAPHY COLLIMATOR DEVELOPMENT
Aracor · Department of Defense
Phase II1993$295,898
DARPA AND THE U.S. SEMICONDUCTOR COMMUNITY ARE ACTIVELY DEVELOPING LASER-PRODUCED PLASMA (LPP) X-RAY SOURCES AS THE BASIS FOR X-RAY MICROLITHOGRAPHY EXPOSURE SYSTEMS. THESE LPP SOURCES WILL ALLOW THE CONSTRUCTION OF COM…