Extended Range Optical Metrology

To address the National Aeronautics and Space Administration (NASA) need for future optical systems with wider fields of view (FOVs) in a smaller package, Intellisense Systems, Inc. (Intellisense) proposes to develop a new Extended Range Optical Metrology (EROM) system based on the innovative combination of adaptive (prescription-free) null lensing and a phase-shifting interferometer. The innovations in the proposed integrated interferometric optical metrology design enable surface figure measurements to resolutions of <10 nm and roughness of <1 Å. By using an adaptive null lens, high-accuracy measurements can be performed over a large range (>1 mm spherical departure) by effectively changing the optical path difference to compensate for large surface displacements or varying surface curvatures. In Phase I, Intellisense will conduct research and analysis of component technologies, architectures, and algorithms through simulations, modeling, and demonstrations to support and predict the suitability of the proposed design and development of a viable conceptual system, satisfying NASA free-form optics (FFO) metrology needs for accurate metrology of FFO components with large spherical departures (>1 mm). An initial system design will be developed, and prototypes of key technological components will be demonstrated via laboratory experiments and analysis to demonstrate achieved specified requirements. Based on this Phase I effort, we will outline the Phase II transition plan for prototype development with risk mitigation strategies. In Phase II, Intellisense will develop a breadboard prototype and test the results to show sufficient data verifying the performance of the proposed EROM design. Intellisense will work closely with NASA’s scientists and end users to bring the technologies to full operational and/or commercial use.