CMOS Photon-Counting Image Sensor with High Spatial Resolution and Room Temperature Operation for High-Performance Visible-Blind UV/EUV Photon Number Resolving

In this proposed project, we plan to further develop a novel platform image sensor, Quanta Image Sensor (QIS), for future NASA missions, and other scientific and consumer applications. The outcome of this project will be a large-format visible-blind CMOS UV/EUV photon-counting sensor with accurate photon-counting capability. The novel sensor will provide some capabilities that are not available with other high-sensitivity detectors, such as accurate photon-number-resolving, zero dead time, low voltage and power requirements, high spatial resolution, and room temperature operation. These features will benefit multiple future NASA missions such as the ESA-NASA Solar Orbiter, Large UV Optical Infrared Survey Telescope (LUVOIR), and the Habitable Exoplanet Mission (HabEx).The core of QIS is the specialized CMOS photon-counting pixels, called “jots.”With our patented innovations, jots can accurately count photons without the use of avalanche gain or cooling. The technology was validated in a 1Mpixel prototype. The accurate photon-counting capability was demonstrated with ultra-low read noise and dark current at room temperature. When combined with the existing advanced back-surface passivation techniques and band-pass filters developed for CCDs and standard CMOS image sensors, a visible-blind QIS with high quantum efficiency in UV/EUV wavelengths can be produced.The ultimate goal of the project is to produce a QIS for high-performance visible-blind photon-counting in the UV/EUV spectral region. The effort in Phase I can provide critical guidance for the prototype design in Phase II. The anticipated results are (1) a detailed manufacturing plan for combining the future QIS products with the advanced back-surface passivation techniques, (2) an optimized jot designed for higher quantum efficiency and less cross-talk especially with short photon absorption depth, and (3) a preliminary plan on modifications required for the radiation hardened detector and circuit design.