Low-Cost, High-Performance CMOS Photon-Counting Sensor without Electron Avalanche Gain for High-Energy Physics and Other Scientific Applications

High-energy particle experiments as well as other types of low-light, scientific imaging experiments typically require specialized, high-performance photodetectors that utilize costly manufacturing processes.As a result, a novel detector structure that can realize these highperformance specifications, such as photon-counting sensitivity, and a fast response time, using a high-volume manufacturing technology is greatly sought after for these fields of study.As long as these new detectors can maintain performance in environments with cryogenic temperatures, high pressures and magnetic fields, improvements in experimental data can be realized using this novel detector.The Quanta image sensor (QIS) is a novel solid-state imaging platform that utilizes singlephoton sensitivity pixels called “jots” fabricated in a commercial CMOS manufacturing process.In contrast to most other silicon-based, single-photon sensitive detectors, these jots do not need electron avalanche multiplication or active cooling to achieve photon-counting sensitivity.Thus, a QIS does not suffer from any of the drawbacks associated with avalanche-based devices, allowing for linear photon-counting, zero dead time, improved stability, improved dynamic range and lower dark count rate.Based on the experimental work, theoretical design, and expert interview done in Phase I, a new prototype QIS intended for high-energy physics applications will be designed, fabricated and tested using the experimentally validated core technologies.This new chip will include larger jot pixels with an increased photosensitive area as well as high-speed, on-chip ADCs to meet the required collect efficiency and time-resolving accuracy.The prototype chip will be fabricated and tested to verify the performance meets the outlined specifications, identify specifications that are not met and potentially make modifications and re-fabricate the chip to fix these issues.The high framerate, large photosensitive area and photon counting capability desired for this CMOS-compatible design is very useful for several applications.High-energy particle experiments, astronomical imaging, and scientific imaging (i.e.fluorescence lifetime imaging, scanning electron microscopy) all rely on single-photon sensitivity and high light collection efficiency for collecting useful experimental data.From a consumer standpoint the improved timing resolution coupled with photon-counting sensitivity have the potential for significantly improving performance in 3D depth imaging, automotive sensing (i.e.LIDAR), machine vision and optical communications.