Analysis of Integrated Circuits Using Limited X-rays

XRadIC establishes an automated software framework to non-destructively analyze cutting edge microelectronics using photon flux-limited x-ray microscope systems. XRadIC couples on-the-fly sample scanning with online optimized 2D and 3D image analysis algorithms to maximize overall system throughput by dynamically minimizing the number of viewing angles and exposure times needed to analyze a given integrated circuit, while scanning and performing image analysis of that circuit progress. XRadIC forms the basis of a scalable, extensible platform for failure analysis and reverse engineering. Based on rigorous physics-based simulation, XRadIC algorithm development includes image-stitching, limited-view computed tomography, and 3D segmentation and classification for integrated circuit wiring structures.A key innovation goal of XRadIC is to combine iterative computed tomography methods inspired by compressive sensing with segmentation methods. This optimization enables significant reductions in sample analysis times compared with conventional computed tomography algorithms on flux-limited microscope systems. Tangent Sciences Phase I initiative validated potential algorithmic approaches through the application of a simulation framework. The Phase II initiative establishes 1) transition ready interfaces, and 2) an application control layer to interact directly with a custom Zeiss Ultra synchrotron microscope, and 3) performs detailed test and evaluation in a non-simulated configuration.