Absolute Distance Interferometer for Manufacturing Metrology Applications

Bridger Photonics, Inc. proposes to develop an absolute length metrology sensor that will simultaneously provide >1,000 measurements per second, 0.5 m maximum measurement distance. Bridger’s solution is will fill a gap in precision measurement technology for applications that require rapid monitoring of macroscopic distances such as positioning and calibration of surface metrology systems (CMM, AFM, SEM), aspheric and freeform optics manufacturing, wafer positioning and optic alignment for the semiconductor industry, and part mapping and positioning for laser materials processing applications. Bridger’s solution will enable several measurement scenarios that are not possible using traditional interferometry such as resolving reflections from multiple surfaces, performing thickness measurements, tracking discontinuous steps, and measuring high-relief or rough surfaces.