A MODULAR, EXPANDABLE, LOW COST MBE SYSTEM FOR A NEW GENERATION OF EPITAXY

Innovative Advanced Materials (IAM), Inc., founded by MBE expert Dr. W. Alan Doolittle, has developed a new generation of MBE tools with revolutionary capability and remarkably lower cost than legacy tools and proposes to construct a prototype tool to demonstrate its power. The prototype tool will be delivered to AFRL for use in the growth of Gallium Oxide shattering current technical roadblocks common to all existing MBE systems. The IAM model VIPER16R tool is based on several IAM Inc. innovations and promises to provide end users unprecedented capability in a modular grow-as-you-go package that allows a user to perform inexpensive partial wafer research on a small initial or operational budget, then expand the same system to multi-wafer production, all while using the same tool. Modularity is further improved by providing an open source software control system that allows a user to add custom components while maintaining advanced OEM functionality. Other innovations include a novel, lower cost effusion cell technology, revolutionary cryo-pumping capability, growth rates of 10-100 m/hour and the optional possibilities for closed loop control of the surface composition via a multi-sensor, in-operando Auger probe.