Optically-Addressed, Hermetically Sealed, and Orientation-Independent Full-Scale Vacuum Gauge

Connectsix LLC proposes to research and develop a MEMS-based vacuum gauge which will enable safe and efficient operation of Navy high temperature superconductivity systems which require vacuum thermal insulation.The vacuum gauge uses novel, inexpensive, and robust MEMS structures, proprietary optical readout techniques, and low-cost commercially-available light sources and detectors to measure pressure-dependent heat loss and vacuum levels. The research and resultant vacuum gauge will have an extended working range, beyond that of standard- and Micro-Pirani thermal gauges, measuring from 2 ATM down to <10-6 Torr.In Phase I Connectsix will demonstrate the function of the new full-scale vacuum gauge through simulation, modeling, MEMS fabrication of test transducers, and simple bench-scale testing.Connectsix will also estimate the gauges operability in a Navy environment through modeling and simulation.The proposed orientation-independent hermetically-sealed thermal conductivity gauge is an ideal solution for the Navys cryogenically-cooled vacuum monitoring needs, as it will provide an accurate gas-independent measurement of the heat loading into their vacuum insulation systems.