Hermetically Sealed Absolute Vacuum Pressure Gauge

Triton Systems proposes to develop a compact and hermetically sealed micro-fabricated vacuum sensor providing wide dynamic range (> 9 orders of magnitude), self-calibration capability, improved durability and reliability, and insensitivity to installation orientation for Navy shipboard applications. The proposed absolute pressure sensor is insensitive to gas species and environmental conditions, and immune to contamination from the vacuum system. Therefore, it is an ideal sensor for long period maintenance-free operation.In Phase I, we will design and optimize the vacuum sensor performance through modeling and simulation. We will build and test vacuum sensor cells to obtain key performance characteristics which will be used to design the Phase II prototype vacuum sensor.During Phase I Option, we will complete analyzing Phase I results and optimize the Phase II Prototype design. We will carefully consider a suitable method of hermetical sealing between the vacuum sensor compartment and control electronics compartment during the prototype vacuum gauge design.