Epitaxial Gallium Oxide Growth System for Ultra High Voltage Power Electronics

High power switching devices are needed for all manner of weapon and defense systems as well as commercial power intense applications. Monoclinic beta()-Ga2O3 is an attractive material for power devices and is in its infancy with respect to development. It has the advantage of having large area economical substrates for device production. We have multiple early stage fielded tools and an in-house tool growing -Ga2O3. This experience positions SMI to further develop the technology to best meet the needs of this solicitation. In Phase I, working with a University partner and two end users and through communications with the Navy, we will finalize the Phase II deposition tool design based upon existing experiences and Phase I material process demonstration efforts. Phase I will include using the in-house tool to test process enhancements planned for Phase II. In Phase II a prototype tool will be built compliant with semiconductor manufacturing standards, tested, and installed at a Navy designated location; whereat Navy personnel will also be trained and supported in operation. Provision will be left for prototype tool enhancements based upon operational feedback. In Phase III SMI will sell deposition systems directly or through license to larger semiconductor tool providers as appropriate.