A Novel Integrated Deflector Sensor for Scanning Probe Microscopy Systems

Next generations of scanning probe microscopy tools will have enhanced operational capabilities, such as improved variable pressure/temperature/atmosphere systems, including reactive cells. Several technologies exist to enable components of these next-gen capabilities, but most rely on optical detection of probe deflection. In many situations, providing optical access to the sample is not readily achieved—scanning probe microscopy systems would benefit from next-generation deflection sensors. Project approach: We propose to develop and demonstrate an integrated deflection sensor based on an inductive measurement technique. These integrated sensors will enable high-speed measurements, including MHz-capable video microscopy, without requiring optical access. Phase I tasks: During the Phase I program, we will model the proposed sensor to determine optical engineering parameters. Micromachining techniques will be used to prepare test coupons for feedback into the models. A breadboard device will be demonstrated to validate the concept. Commercial Applications and Other Benefits: Performance enhancements for materials important to energy generation, transmission, storage, and conversion are being innovated at the nanoscale more and more often—scanning probe microscopy tools are most powerful in the nanoscale regime and are being used to great effect to reveal secrets about these energy technology materials. The development of advanced scanning probe tools will open the door to the study of additional materials under new conditions and with greater ease.