SBIR/STTR Research Award
Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications
Award amount
$750,000Program and phase
STTR · Phase IIAward year
2014Award details
- Awarding agency
- Department of Defense
- Branch
- Army
- Recipient company
- STRUCTURED MATERIALS INDUSTRIES, INC.
- Proposal award date
- 2014-09-29
- Contract end date
- 2015-09-30
- UEI
- WMLSF59AE7E1
- Solicitation number
- 2012.0
- Topic code
- A12a-T020
Research abstract
In this STTR program, Structured Materials Industries, Inc. (SMI) and partners will develop hardware and process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- SiC Low Gain Avalanche Diode (LGAD) for Minimum Ionization Particle (MIP) sensors
- Optimal Radiation Tolerant High Intensity High Temperature Photovoltaics
- Large Area InGaN/GaN MQW p-i-n Avalanche Photodiode Cherenkov Radiation Detectors
- High Performance High Current CW polarized photocathodes for Electron Ion Colliders
- Innovative Equipment Large Single Crystal CdZnTe Production for Long-Wave Infrared Detector Arrays
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS Applications
- Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications
Research funding history
177 SBIR/STTR records share this UEI (1992–2024). Reported award amounts total $45,517,958. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, Department of Energy, National Aeronautics and Space Administration, National Science Foundation, Department of Commerce, Department of Homeland Security