Atomic Layer Deposition of Lead Zirconate Titanate Thin Films for PiezoMEMS Applications

A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD temperature for one constituent oxide is often different from that of another. Researchers at University of California Los Angeles (UCLA), have developed thermal and radical enhanced ALD processes to address these concerns and realized the synthesis of many complex metal oxides, including PZT. Maritime Applied Physics Corporation (MAPC) is teaming up with UCLA to leverage this previous research and develop atomic layer deposition of PZT for MEMS scale actuation.