SBIR/STTR Research Award
In-situ Stress and Temperature Optical Monitoring for low-cost heteroepitaxial substrates for HgCdTe infrared detectors.
Award amount
$723,505Program and phase
SBIR · Phase IIAward year
2011Award details
- Awarding agency
- Department of Defense
- Branch
- Army
- Recipient company
- k-Space Associates, Inc.
- Proposal award date
- 2011-09-27
- Contract end date
- Not reported
- UEI
- MFJSKTKNHJX4
- Solicitation number
- 2009.3
- Topic code
- A09-151
Research abstract
An integrated, in-situ, real-time, optical metrology system will be developed to measure temperature, film stress and reflectivity during CdTe and HgCdTe-based deposition applications. Temperature measurement will be performed using band-edge thermometry and blackbody radiation analysis to provide a measurement range of 25-800 degrees C on Si, GaAs, and CdTe-buffered Si/GaAs substrates. The system will be capable of full 2D substrate temperature profiling to provide uniformity analysis. Stress and reflectivity measurement will be made using an etalon-based multiple laser beam array. All measurements will be made simultaneously and will be synchronized to the substrate rotation. The system will be designed with the flexibility to be mounted on multiple reactor geometries.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- Advanced, High-Sensitivity, Multi-Species, In-Situ Film Growth Monitor Utilizing Atomic Absorption Spectroscopy
- Advanced, High-Sensitivity, Multi-Species, In-Situ Film Growth Monitor Utilizing Atomic Absorption Spectroscopy
- In-situ Stress and Temperature Optical Monitoring for low-cost heteroepitaxial substrates for HgCdTe infrared detectors.
Research funding history
4 SBIR/STTR records share this UEI (2010–2016). Reported award amounts total $1,905,827. Reported amounts are not federal obligations.
Phases: Phase II, Phase I
Agencies: Department of Defense, Department of Energy