Roll-to-Roll Printing of Patterned Nanomembranes on Flexible Substrates

The objective of this phase I STTR project is to develop and demonstrate a roll-to-roll process for printing semiconductor and metal nanostructures with lateral dimensions as small as 100 nm on flexible substrates. systeMech will collaborate with the University of Wisconsin-Madison (Prof. M.G. Lagally"s group) to develop and characterize a process for transferring semiconductor and metal nanomembranes, which have been patterned via nanoimprint lithography at the wafer-level, to flexible substrates. The transfer of nanostructures patterned at the wafer-level has significant advantages over direct nanoimprinting, including better etching capabilities and fewer distortion problems. The primary objectives for phase I are: (1) Demonstrating retrieval of patterned nanostructures using a rotating stamp, (2) Demonstrating printing of nanostructures on flexible substrates using a rotating stamp, and (3) Designing a complete roll-to-roll manufacturing process capable of patterning>0.1 square meters. These objectives will be accomplished through mechanical modeling of the manufacturing process, retrieval and printing experiments, and process characterization. systeMech is a newly-formed small business, and the founders have experience in semiconductor manufacturing, mechanics, and nanoengineering. Prof. Max Lagally at the University of Wisconsin-Madison is a leader in nanomembrane processing for electronic and photonic devices and currently leads an AFOSR-funded MURI on nanomembranes.