Ultra High Temperature Capacitive Pressure Sensor

To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600ºC). The Phase II effort will include: the development of materials formulations and fabrication processes to realize optimized devices, device prototyping, and laboratory scale/relevant environment testing such as to achieve TRL 5-6.