A Small, Rugged, Accurate Bleed Flow Measurement System Based on a Novel Polymer Derived Ceramic MEMS technology.

Modern weapon systems are being developed with real-time power available calculation and feedback capability for improved situational awareness. Bleed flow has a significant impact on the accuracy of these calculations, and currently fielded turbine engines have either no measurement capability or employ Venturi systems which are heavy, expensive, and suboptimal for high volume flows. Thus there is a need for a small, lightweight, low cost turbine engine compressor discharge bleed flow measurement system capable of efficient, in-situ, real-time measurement for high volume bleed flow applications. Accurate measurements of these bleed flows will enable accurate calculation of current power available, improving safety as well as optimizing mission planning and maintenance. Technical challenges for developing sensors for turbine engine applications lie in that the sensors have to survive extremely harsh working conditions, including high temperatures, elevated pressures, and corrosive/erosive environments. The objective of this proposed work is to develop small, low cost turbine engine compressor discharge bleed flow measurement system based on Sporian Microsystems proprietary silicon carbide nitride (SiCN) MEMS technology. Phase I work tasks will include: working with turbine engine OEMS to define requirements, sensor design evaluation, associated packaging design evaluation, and proof of principle feasibility testing.