SiCN Based High Temperature Sensor Materials Optimization and the Development of Thin Film Sensor Fabrication Methods

Recent studies sponsored by the Air Force Research Lab (AFRL) have confirmed that tremendous benefits can be achieved through a maturation and integration of Integrated System Health Management (ISHM) sensor technologies into future Air Force systems. Recently developed silicon carbide nitride (SiCN) based, polymer derived ceramics (PDCs) are a group of amorphous, high temperature materials, which possess excellent mechanical and electric properties at high temperatures up to1600 ºC.  Sporian Microsystems, Inc. has established a solid track record of successful research and development of SiCN high temperature sensors and packaging architectures. Our approach is to extend the PDC technology into an advanced conformal coated thin film sensing and data acquisition system. The goal of this effort is twofold: further refine/modify SiCN based ceramic materials for conformal temperature and strain sensing applications and assess the feasibility to produce thin film sensors on substrates quickly in an industrial environment. The end objective of this proposed work is to develop the groundwork for fabrication of high temperature (1600 ºC) SiCN-based thin film temperature and strain sensors suitable for a wide range of conformal applications in gas turbine engines. Feasibility of selected conformal patterning/coating technologies will be assessed for the thin film sensors.   BENEFIT: Aero propulsion turbine engines, communally used in commercial and military jets, would benefit significantly by having a non invasive, small mass, on engine component sensor allowing for visibility of the conditions of the turbine engine.  The technology and sensor product described in this proposal would allow exactly that, while existing sensors fall well short of the applications demand.   The conditions in this application are harsh, and sensors must be able to withstand high temperatures, high pressures, jet fuel and exhaust.  In order for existing and future aero propulsion turbine engines to improve safety reduce cost and emissions while controlling engine instabilities, more accurate and complete information is necessary.  The technology described in this proposal would allow the next boundary in sensing technology to be achieved, direct measurement from the point of interest within the turbine.   Commercial applications abound for the successful results of this proposal in commercial and military turbine engine industries, which are made up of companies such as Pratt & Whitney and Rolls-Royce.   Additional potential market areas include: aerospace, marine propulsion, land based power generation turbines, automotive, oil and gas, and government and academic laboratories.