Massively Parallel Micromachining with Ultrafast Lasers

Having recently built a 32-beam micromachining workstation, a systematic investigation that rigorously quantifies the multifocal, micromachining approach will be performed. While the manufacturing throughput gains of a multifocal approach are obvious, the method needs to be thoroughly characterized to identify the conditions that produce the features of highest integrity at the highest manufacturing rates. Initial studies will focus on those structures most important for laboratory-on-a-chip prototyping: microfludic channels, optical waveguide production, microlens fabrication. One of the tremendous advantages of using a single platform for a diverse fabrication process (such as creating a lab-on-a-chip), is that the characteristics of the fabricated structures (be they waveguides, channels, lenses, etc.) are dependent on essentially the same parameters: material type, focal geometry (e.g., degree of beam overlap) , focal spot formation, sample translation speed, laser wavelength, pulse energy, pulse duration, pulse stability, pulse pedestal, and repetition rate. Thus, it is important to understand the relationships between these parameters as applied to device fabrication. The experiments are specifically designed to measure this interplay, and compare to predicted, modeled material modifications. The anticipated experimental flow will follow a systematic procedure for each targeted feature. BENEFIT: This effort will provide information to help advance ultrafast machining in a highly paralell manner. It is intended to prove that this process can work for creating "lab on a chip" devices for sensors, and microfluidics for ultrafast chemistry. This could lead to a manufacturing station for making micro to nano size devices 100's to 1000's at a time.