High Bandwidth Plasma Sensor Suite for Flow Parameter and Vibration Measurement

We propose to develop a suite of MEMS-miniature, a.c.-driven, weakly-ionized plasma devices configured as flush-mounted sensors for direct measurement of heat flux, mass-flow, strain, and gas species for advanced engine prognostics and diagnostic monitoring. Among the advantages of plasma-based sensors are that they are mechanically robust with no moving parts, can survive high vibration and heat loading, and have a high frequency response in excess of 1 MHz. The Phase I effort will consist of designing and fabricating the suite of plasma sensors and electronics that are capable of measuring mean and fluctuating wall heat flux, flow, strain, and gas species. A MEMS approach will be used to create thin-film versions that can be vapor deposited to a surface which will have parallel applications described in the N08-004 solicitation. During the phase I, the Transonic Compressor Facility at University of Notre Dame will be used as a test bed for gas-turbine applications and during the phase II, further assessment of the sensors will be made at a test facility of choice to the Naval Research Laboratory. This work will be a natural outgrowth of our extensive experience in developing the a.c. plasma sensors for high-speed mass-flux applications which relies on the same physics as the sensors proposed here.