High Resolution Long Wave Infrared Focal Plane Array Development

Infrared (IR) detection is an integral part of the Global War on terrorism. Vandium Oxide based micro-bolometers are the current state of the art in uncooled IRFPA. The need for higher resolution 1280X960 arrays that operate at low power for man-portable applications include 24 hour surveillance and targeting . Carbon Nanotube (CNT) based IR detectors could fill this need. CNTs have unique electrical, optical, thermal, mechanical and chemical properties that may prove advantageous for IR sensors. Current Vandium oxide based IRFPAs are limited in sensitivity due to their noise floor. CNT technology has lower 1/f noise and thus increased sensitivity. Nantero, a leading nanotechnology company that has demonstrated capability in the fabrication of several nanoelectronic devices and has developed proprietary CNT technologies and integration methodologies using standard CMOS integration techniques such as spin-coating, lithography, reactive ion etching and metal deposition. Nantero has demonstrated the ability to integrate into the CMOS wafer fabrication processes at two major facilities. Using our CNT fabrics which can be patterned using standard CMOS lithographic techniques, large format specification compliant IRFPAs can be produced at high yield and low cost. Nantero proposes a unique pixel design that is simpler then current VOx microbolometer technology , yet capable of meeting the specifications listed in the SBIR solicitation. In addition this technology is dual use with several existing applications in the commercial market place which need large format uncooled IRFPA with increased sensitivity at low cost.