A MEMS–Based Sensor for Automation and Control of Fluid Valves

Flow inventory for the Automated Fire Suppression System (AFSS) will enable early detection of leaks and damage and will enable distributed control schemes that are robust to localized damage. Very sensitive pressure sensors are required to implement such a system. The sensitivity must be complemented by extremely high over-pressure capability. This program continues the development of a MEMS-based sensor. This technology is an extension of the pressure sensor technology that has already been demonstrated for sensing combustion events in diesel and turbine engines. The sensor has very high sensitivity allowing for a smaller size, is very robust, and is mechanically and chemically robust. The MEMS fabrication technology makes it inherently inexpensive. In this Phase II program, the application specific sensor will be packaged, tested and optimized.