A MEMS-Based Sensor for Automation and Control of Fluid Valves

In this program, Orbital Research Inc. will enhance its current embedded pressure sensor technology, which previously has been demonstrated for sensing in-situ engine combustion events, for the automation and control of shipboard fluid valves. Precise control of high pressure fluidic systems is currently accomplished using high performance control valves. Performance of these valves can be improved by coupling them with local pressure sensors to allow feedback control. Adding data feedback to damage control, propulsion and other shipboard systems will enable improved safety, greater efficiency and better system survivability while requiring less manning. This proposal presents an innovative MEMS-based sensor system which exhibits very high sensitivity allowing it to be small and non-intrusive. Its material composition makes it very robust, chemically resistant, and survivable in a variety of environments, including salt water, lube oil, and hydraulic fluid. The MEMS fabrication technology makes it inherently inexpensive and allows flexibility in packaging to accommodate communication options. In this Phase I program, a sensor will be designed, and fabricated for laboratory testing to ensure robustness and prove the feasibility. The Phase II program will build on the Phase I through detailed design optimization including extensive full-scale prototype testing in a working fluid system. At the conclusion of this successful SBIR program, Orbital Research anticipates having a system ready for Phase III field evaluation on a future combatant platform such as DD(X).