High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor engine instabilities in aero propulsion turbine engines, miniaturized, robust sensors are needed. The end objective of this proposed work is to develop a high temperature measurement (operating to 900oC+) and pressure measurement (operating to 650 psia), MEMS, silicon carbide nitride (SiCN) based sensor suite suitable for use in a aero propulsion turbine engines. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electrical properties at the high temperatures and harsh environments associated with the application. Work tasks will include the material synthesis, components design, packaging design, prototype fabrication, and the validation of the proposed sensor in laboratory test systems and in simulated environments provided by turbine industry partners. Technical challenges lie in that the sensor suite has to operate and survive over suitable time frames in extremely harsh working conditions, including high temperatures, elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading, while maintaining compatibility with established and future turbine infrastructure.