High Temperature MEMS Sensor Suite for Aero-propulsion and Power Technologies

To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor the engine health status of gas turbine engines and advanced propulsion systems, miniaturized, robust sensors would be highly advantageous for measuring and monitoring physical parameters, such as pressure, temperature, flow. The end objective of this proposed work is to develop, single, high temperature (1300 C), MEMS, silicon carbide nitride (SiCN)-based temperature, pressure, and flow sensor suite suitable for a wide range a uses in gas turbine engines and advanced propulsion system applications. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. In addition, the various processing technologies, such as photolithography, DRIE etching, injection molding, embossing, and precise machining can be utilized for the fabrication of the SiCN MEMS devices. Work tasks will include the evaluations of: material electrical properties, existing and new sensor designs, process techniques and suitability, and analytical and numerical modeling for design verification. Technical challenges lie in that the sensors have to survive extremely harsh working conditions, including high temperatures (as high as 3000°F), elevated pressures, pressure oscillations, corrosive environments, surface coating or fouling, and high particulate loading.