SBIR/STTR Research Award
Segmented MEMS Mirror Arrays
Award amount
$594,464Program and phase
SBIR · Phase IIAward year
2005Award details
- Awarding agency
- National Aeronautics and Space Administration
- Branch
- Not reported
- Recipient company
- Umachines
- Proposal award date
- 2004-11-22
- Contract end date
- 2004-11-22
- UEI
- MC5ANT49MFE6
- Solicitation number
- Not reported
- Topic code
- S2.05
Research abstract
The objective of this proposal is to deliver state-of-the-art, bench-top deployable, large-throw and tip/tilt, low cross-talk, high resolution, highly scalable and fast response wavefront control devices (deformable mirror, or DM) based on micro-electro-mechanical (MEMS) fabrication processes. The device consists of Segmented Membrane Arrays (SMA). The design uses highly uniform (both mechanically and optically) arrays of mirror pixels to eliminate the cross talk with adjacent elements, which is usually observed in continuous membrane devices. It opens new opportunities to make ideal deformable mirrors with large-throw and independent addressing capabilities.
Technology keywords
Not reported
Other awards by this recipient
Verified by the same UEI. These are other public SBIR/STTR award pages, not a merged company record.
- SBIR Phase II: Microelectromechanical (MEMS) Mirror Arrays for Bioimaging Applications
- MEMS Mirror Arrays for Beam Steering
- Segmented MEMS Mirror Arrays
- SBIR Phase I: MEMS Mirror Arrays for Bioimaging Applications
- Revolutionary Beam Steering Technology for Imaging Laser Radar
Awards with the same topic code
Verified by an exact topic code match. This is not a text-similarity match.
- Optical Fabrication and Metrology of Aspheric and Freeform Mirrors
- Cryogenic and Vacuum Compatible Metrology Systems
- Very large computer generated holograms for precision metrology of aspheric optical surfaces
- Optical Fabrication and Metrology of Aspheric and Freeform Mirrors
- High-Resolution Detector for At-Wavelength Metrology of X-Ray Optics
Research funding history
12 SBIR/STTR records share this UEI (1998–2006). Reported award amounts total $3,331,732. Reported amounts are not federal obligations.
Phases: Phase I, Phase II
Agencies: Department of Defense, National Aeronautics and Space Administration, National Science Foundation