SBIR Phase I: MEMS Mirror Arrays for Bioimaging Applications

This Small Business Innovation Research (SBIR) Phase I research project will demonstrate the feasibility of manufacturing large-throw, optically flat, high resolution and fast response-speed deformable mirrors (DM). The DM is a critical component in adaptive optics, which can be applied to improve medical imaging technology. The device consists of Segmented Membrane Arrays (SMA) and bottom electrodes with Backside Solder Bump (BSB) fabricated by micromachining technology. The design will use arrays of mirror pixels to eliminate the cross talk between adjacent elements. The mirror pixels will be made of stress-free single crystalline silicon (SCS) to ensure optically flat surfaces. The commercial application of this project will be in a number of areas, including bio imaging instruments, telescope systems, 3D data storage systems and free-space optical communications.