Automated Batch Polishing and Reclaiming System for Epi-ready CdZnTe

Materials and Technologies Corp. (MATECH) has developed a process and a system platform for batch polishing and reclaiming of CdZnTe substrates. In a short period of four months, MATECH's polishing process produces substrates that approach state-of-the-art quality. MATECH has also explored the issues involved in reclaiming said substrates. The current tool provides an excellent platform for process optimization and a significant step in developing a fully automated tool for reclaiming and polishing. Most issues relevant to the design of a fully automated tool have been identified and quantified. Phase II of this effort will advance the program along a two-pronged route: 1) Using the manual system, will further optimize the process to meet state-of-the-art specifications; and 2) Port the manual tool concept and technology into a fully automated system capable to implement the latest version of the process and polish batches of samples of sizes of up 20 70X70 mm substrates at a time. By the conclusion of Phase II, MATECH will deliver a tool capable of said processes to the Government. Finally, MATECH will also explore the possibility to become involved in the manufacture of said systems, the supply of EPI-ready CdZnTe substrates, and the reclaiming of the same.