Embedded Smart Pressure Sensors for Automation and Control of Fluid Valves

The objective of our proposal is to demonstrate the feasibility of producing a low profile, small size, all stainless steel pressure sensors which is suitable for the automation control of fluidic valve (smart valve). This Phase I project will develop novel capacitive strain gage and eventually an all stainless steel pressure sensor will be developed using this new strain gage. Capacitive sensing is inherently high sensitive and near zero temperature effects. All stainless steel pressure design is rugged and suitable for harsh environment, such as, in salt water, hydraulic oil, lube oil, and even in heat exchangers. The strain gage will be batch fabricated using micromachining method, thus low cost. A commercially available very low power consumption wireless network will also be studied in Phase I. In Phase II, an ultra-miniature and low power consumption wireless network will be developed and will be incorporated with the newly design pressure sensor to form a complete package for automatic control of fluidic valve.