Integrated Multi-Vessel Surface Process System For Optical Device Fabrication

We propose to provide a set of general design drawings describing a multi vessel UHV growth and surface analysis system which is based on the concept of central distribution sample handling. The type of UHV system discussed in this proposal is of interest be- cause electronic and optical device fabrication techniques have suffered from difficulties arising from the need to analyze device parameters during growth or right after growth. The simplest system configuration includes a qrowth chamber, a sample transfer chamber which holds the central distribution sample handling device, and a surface analysis chamber. Full system integration in terms of mechanical design and sample transfer efficiency will be assured through expert design and engineering.