Adaptable Sensor Packaging for High Temperature Fossil Fuel Energy Systems

Avanced, integrated control systems will be essential to achieving the cost and performance targets of high-efficiency, low emissions fossil-fuel plants. Micro-electric-mechanical-systems (MEMS) and other types of micro-sensors will play an important role by providing critical real-time measurements that are needed to optimize these processes. Although micro-sensor technologies have been demonstrated, better packaging is needed that will protect the micro-sensors from harsh environments, allow the sensors to be exposed to the gas stream, and interface the sensors with high temperature electronics, housings, and hardware. This project will develop a standard, engineered testing package, with an integrated protective housing, for applying micro-sensors in high temperature harsh environments. The technical approach will leverage established ceramic microelectronics packaging and high temperature thermocouple concepts, by using proper design and material selection. Phase I developed a design framework for a general purpose high temperature sensor package and conducted experiments to evaluate feasibility. Phase II will develop a prototype, standard, engineered testing package. Specific tasks include: (1) the development of key structural components; (2) the development and testing of high temperature electrical interconnect and ¿die attach¿ technologies; (3) the finalization of a design for, and fabrication of, a prototype package; and (4) the experimental demonstration of the prototype in high-fidelity laboratory testing and external stimulant application test systems. Commercial Applications and other Benefits as described by the awardee: The sensor packaging technology would allow end application integrators, such as gas turbine and fuel cell manufacturers, to realize the benefits associated with the advanced sensors. These sensors could be designed sensors into their equipment using a common, standardized packaging infrastructure. In addition to energy generation, a low-cost high reliability packaging for harsh environmentals would be useful in a wider range of other commercial applications such as propulsion, aerospace, automotive, and the military. The public as a whole would benefit from reduced emissions, enhanced efficiency, and overall lower operating costs