SiCN High Temperature MEMS Sensor Suite

72422-To improve performance and efficiency, reduce pollution, and achieve optimal control of power generation systems (such as turbines, fuel cells, gasification systems, and advanced combustion systems) robust sensing systems are needed to monitor parameters such as pressure and temperature in situ in harsh environments. SiC- and Si3N4-based MEMS sensors are among the few types of sensors that can be utilized for the direct measurement of pressure and temperature distributions in the combustion chamber of turbine engines or other high temperature environments. Unfortunately, the maximum working temperatures of these technologies is not high enough for many applications. This project will develop a temperature and pressure sensor that will be useful for energy generation applications to 1400¿C, with excursions to 1500¿C. Phase I established the feasibility of using SiCN for the application, through detailed design analysis, material property measuements, and experimental validation. Potential end users for the application were involved throughout the project to help guide the design toward commercial applications. Phase II will develop a prototype sensor. This will include fabricating prototype sensors, improving and verifying the performance of the SiCN-based materials, and testing and evaluating the prototypes. Commercial Applications and Other Benefits as described by awardee: The new sensor should allow turbine operators and other energy generation equipment operators to monitor the conditions of equipment in sections that operate at elevated temperatures. Significant market opportunities include the land-based gas turbine industry and the propulsion or aero gas turbine industry.