Dynamic Fabry-Perot Tunable Filter for MWIR

We propose a phase II to develop a dynamic Fabry-Perot Tunable Filter (FPTF) array system tunable over the medium wave infrared (MWIR) for multi-spectral imaging, target acquisition, night vision and gas sensing. Base on the successful demonstration oftunability and fabricability in phase I, we will complete the development of a full 128x128 array system using the poly-dimethyl-siloxane (PDMS) process with the complementary-metal-oxide-semiconductor (CMOS) technology for fabrication. Phase II willproduce a fully operational array with high yield by resolving the remaining issues of: (1) fabrication of the micro FPTF structures in the 128x128 array format; (2) incorporation of sufficient on-chip circuits for tuning control while preserving a highyield; (3) fabrication of external electronics for array control: and (4) operation of the array with an MWIR focal plane array (FPA) to evaluate multi-spectral imaging. We will carry out a set of specific tasks in a 24-month program that will result inthe delivery of a fully operational 128x128 array system complete with supporting electronics. This program will prepare us to commercialize a set of competitive products based on the micro FPTF structure for the defense as well the gas sensing markets.