Conductive AntiStiction SAMs for MEMS Devices

Micro-electromechanical systems (MEMS) are gaining increasing interest as potential devices to be used in strategic sensor platforms. However, to operate successfully, surface force-induced stiction and parasitic charge build up in MEMS devices must be addressed, as they are two key failure mechanisms that lead to loss of function. Coating MEMS devices with self-assembled monolayers (SAMs) that are conductive along the length of the molecule, but insulative laterally across the device will mitigate both mechanisms, and lead to MEMS devices as a viable option for strategic sensors. During the Phase I, Lynntech identified a class of SAMS that could be selectively vapor deposited on silicon and not oxides or metals, with preliminary evidence suggesting it achieved the desired anti-stiction and anisotropic conductive properties. Phase II will focus on scaling up and optimizing coating coverage on silicon wafers, along with investigating the manufacturing feasibility of incorporating the SAMs deposition process into pre-existing MEMS fabrication processes.