Conductive Anti-Stiction SAMs (CAS-SAMs) for MEMS Devices

Micro-electromechanical systems (MEMS) are gaining increasing interest as potential devices to be used in strategic sensor platforms. However, to operate successfully, surface force-induced stiction and parasitic charge build up in MEMS devices must be addressed, as they are two key failure mechanisms that lead to loss of function. Coating MEMS devices with self-assembled monolayers (SAMs) that are conductive along the length of the molecule, but insulative laterally across the device will mitigate both mechanisms, and lead to MEMS devices as a viable option for strategic sensors. Lynntech is developing a coating system to selectively vapor deposit SAMs on silicon and not oxides or metals, which will make our system applicable to incorporation at any point in the MEMS devices fabrication process. Phase I will focus on SAMs selection and feasibility of deposition technique. Stiction and conductivity measurements will be performed to determine viability of different systems, and Phase II will follow with the development and refinement of a prototype system.