Single Chip Micro Electrical Mechanical Systems (MEMS) Environmental Sensor Suite

"The objective of this SBIR proposal is to design and develop a low cost, micro-electromechanical systems (MEMS), multi-sensor "suite" consisting of 3-axis shock,temperature and humidity sensors, all operating on a single microchip. The desiredperformance characteristics being: temperature: -50 to 165 degrees F, humidity:10-95% RH (+/- 6%), 3-axis shock: +/- 500 g's (+/-5%). Work will concentrate ontrying to answer the questions of: what are the optimum designs for each sensor typewith an emphasis on device integration, and what packaging solutions/configurationwill best allow for integration and sensor function while minimizing final unitpower and cost. Specifically, one system configuration has been proposed that usescombined optical and mechanical MEMS sensing techniques, which allows for theassociated packaging to satisfy each sensor type's unique packaging requirements.Work tasks will include studying design, packaging, power minimization, relativemerits of various fabrication processes, and analytical and numerical modeling.The work will be performed through a partnership between Sporian Microsystems andLMTS-Eagan that will take advantage of the two companies combined considerableknowledge base in MEMS design, fabrication, integration, subsystem design, andpackaging. To date, the Army has not had a low cost device that could track the completeenvironmental exposure history of the munitions. Therefore one of the drivers fordevel