MEMS Sensors for Wind Tunnel Applications

Foster-Miller and the University of Florida propose to design a dual mode MEMS-based pressure/temperature sensor using unique processes developed by the team. The objective is to create sensing elements for both modes with higher sensitivity and lowernoise than available with standard processing methods. The design and feasibility of the entire sensing system will be addressed including signal processing, wireless communications, wireless power, EMI resistance, packaging and quick connect/disconnecttechniques. (P-01365)An autonomous MEMS-based pressure/temperature sensor, integrated with wireless communications and power, will reduce cost and setup time of wind tunnel testing. These improvements will apply to wind tunnel testing for both military and commercial aircraftdevelopment. The technology will be applicable to commercial products, such as industrial process control systems, heating and air conditioning systems, and environmental monitoring applications.