Adaptable Sensor Packaging for High Temperature Fossil Fuel Energy Systems

79714S Avanced, integrated control systems will be essential to achieving the cost and performance targets of high-efficiency, low emissions fossil-fuel plants. Sensors based on Micro-electric-mechanical-systems (MEMS) and other types of micro-sensors will play an important role by providing critical real-time measurements that are needed for optimizing these processes. While the sensing elements have been demonstrated, what is missing is packaging to protect the micro-sensors from harsh environments, allow the sensors to be exposed to the gas stream, and interface the sensors with high temperature electronics, housing, and hardware. This project will develop a standard, engineered-testing package, with an integrated protective housing, for using micro-sensors in high temperature harsh environments. Phase I will evaluate existing technologies and materials, determine the suitability of novel materials and processes, identify a preliminary package and housing design, identify an optimal fabrication process, and evaluate associated cost and manufacturability tradeoffs. The final deliverables will include a preliminary package and housing design, as well as a defined fabrication process that will lay the foundation for Phase II. Commercial Applications and other Benefits as described by the awardee: An array of physical and chemical sensing micro-sensor technologies for high temperature energy generation applications should play an important role by optimizing the conversion of fossil fuel for power generation. The result would be a significant increase in plant efficiency, lower emissions, and low maintenance and operating costs.